| Mark type |
SEMI M12, M13, M1.15,SEMI T1.95 |
| OCR fonts |
SEMI FONT (straight, concave and convex), NON SEMI FONTS |
| 2D codes |
ECC200, T7 Data Matrix, QR Code and M1.15 |
| Barcodes |
BC412/IBM412,IBM & SEMI T1-95, Base 35 |
| Region of Interest |
Flexible auto catching ROI |
| Field of view |
35×13mm, Ultra-wide field of view |
| LED |
Multi-channel RGB (Red/Green/Blue)
440-480nm(Blue) - 500-555(Green) - 620-650nm(Red)
|
| Object wafer |
OCR Font, DataMatrix, T7, QR Code, Barcode on any wafer surface |
| Light mode |
15 internal external (3 colors-RGB)
+ 3 additional external RGB source
|
| Intensity of illumination |
Variable with automatic exposure controller - Dynamic Range 1: 10,000 |
| Lens type |
Aspheric lens (made in Germany) with bandwith passfilter |
| Depth of focus |
±4mm |